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聚焦离子束-扫描电子显微镜(FIB-SEM)双束系统将高精度离子束加工与高分辨率电子束成像集成于一体，已成为材料微区成分与结构表征的重要平台。本文聚焦于FIB-SEM在材料成分分析中的应用，系统介绍了FIB-SEM、能谱仪(EDS)及原子探针层析技术(APT)的基本原理与系统构成，重点阐述了两类联用技术路径：一是FIB-SEM与EDS的原位联用，包括截面物相识别、三维结构重构以及“3D-EDS”三维成分分析，实现了从微米到亚微米尺度的成分与结构协同表征；二是FIB-SEM与APT的联合表征，利用FIB的高精度定位与微纳加工能力制备针尖样品，实现了原子尺度的三维成分解析。此外，文章分析了FIB加工过程中产生的离子注入、非晶化及伪相转变等损伤类型及其影响因素，总结了降低加工电压、采用Xe离子源、低温加工及低能Ar+清洗等有效策略。最后，展望了FIB-SEM在多模态联用、智能化高通量表征及材料基因组研究中的发展趋势。
Abstract：The dual-beam focused ion beam-scanning electron microscope(FIB-SEM) integrates high-precision ion beam machining with high-resolution electron beam imaging,and has become an important platform for microarea compositional and structural characterization of materials. This review focused on the application of FIB-SEM in materials compositional analysis. It systematically introduced the basic principles and system configurations of FIB-SEM,energy dispersive X-ray spectroscopy(EDS),and atom probe tomography(APT). Two typical correlative technical routes were highlighted:1) In situ combination of FIB-SEM and EDS,including crosssectional phase identification,three-dimensional(3D) structural reconstruction,and "3D-EDS" compositional mapping,enabling synergistic characterization of composition and structure from micrometer to sub-micrometer scales;2) Correlative analysis of FIB-SEM and APT,where the high-precision positioning and micro/nanofabrication capability of FIB was used to prepare needle-shaped specimens for atomic-scale 3D compositional analysis. Furthermore,the damage types induced during FIB processing,such as ion implantation,amorphization,and pseudo-phase transformation,as well as their influencing factors,were discussed. Effective mitigation strategies including reducing acceleration voltage,employing Xe ion sources,cryogenic processing,and low-energy Ar+ cleaning were summarized. Finally,future developments of FIB-SEM in multimodal correlative characterization,intelligent high-throughput analysis,and materials genome research were prospected
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基本信息:
DOI：10.20236/j.CJIAC.2026.06.007
中图分类号:TB302;TN16
引用信息:
[1]乔祎.聚焦离子束-扫描电子显微镜(FIB-SEM)在材料成分表征中的应用[J].中国无机分析化学,2026,16(06):1017-1033.DOI:10.20236/j.CJIAC.2026.06.007.
基金信息:
国家自然科学基金资助项目(52273280)~~
2026-04-24
2026-04-24
2026-04-24